M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive This standard was technically approved

Name: M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive This standard was technically approved
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Description

This standard was technically approved by the global Information & Control Committee

and the sampling interval determines the highest observed spatial frequency

SEMI M18 — Guide for Developing Specification Forms for Order Entry of Silicon Wafers

but it is recommended that the tests be repeated on an annual basis or whenever the instrument appears to be out of control

orgで入手可能となる。初版は1989年発行，前版は2003年1１月発行。

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive This standard was technically approvedGaAs Referenced SEMI Standards None.

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