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P02400 - SEMI P24 - CD Metrology Procedures StdPbc-0422 SEMI P48-1110 (first published)

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Description

SEMI P48-1110 (first published)

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P02400 - SEMI P24 - CD Metrology Procedures StdPbc-0422 SEMI P48-1110 (first published)This standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1994. NOTICE: This Standard or Safety Guideline has an Inactive Status because the

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