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SEMI D22-0818 (technical revision)
SEMI E112-1104 (technical revision)
SEMI 3D8-1121 (technical revision)
NOTICE: This Document was balloted and approved for withdrawal in 2010
It includes generic overlay target design methodology
D01900 - SEMI D19 - Test Method for the Determination of Chemical Resistance of Flat Panel Display Color Filters StdPbc-1011 SEMI D22-0818 (technical revision)1 Purpose 1. 1 This Standard establishes two methods for evaluating the chemical resistance of FPD color filters. One of these methods is qualitative, the other is quantitative. 2 Scope 2. 1 These methods may be used by suppliers and users of color filters for FPD applications, for use in judging quality of production and developing samples. 2. 2 These methods test the chemical resistance of color filters by utilizing chemicals and conditions