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TSVにとって重要な計測に関する問題の理解と議論を行うための一貫した用語を規定することである。
This Specification covers the content
The specification defined by this Standard is applicable to the case for containing substrate materials used in FPD mask manufacturing process
This Document covers a monodispersed GNP challenge test method for 20 to 50 nm rated liquid filter
It applies to substrates whose nominal thickness specification is 1
C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0920 TSVにとって重要な計測に関する問題の理解と議論を行うための一貫した用語を規定することである。This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.