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C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3) StdPbc-0212 previously published February 2012

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Description

previously published February 2012

SEMI C28-0618 (technical revision)

As long as liquid is present in the cylinder

1  The purpose of this Standard is to standardize requirements for mixed acid etchants used in the semiconductor industry and testing procedures to support those standards

org in May 2018

C07100 - SEMI C71 - Specification and Guide for Boron Trichloride (BCI3) StdPbc-0212 previously published February 2012The purpose of this Document is to provide specification and guide for boron trichloride (BCl3) that are used in the semiconductor industry. This Specification relates to a geometry of 0. 5 or less (0. 35 to 0. 5 range) and describes analytical techniques using gas phase analysis. If analytical methods are not complete, the requirements are presented as guides. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision

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