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SEMI C93-0522 (technical revision)
SEMI C31-0699 (first published - replaces SEMI C1
buffer oxide etchants
1 The purpose of this Document is to provide specifications for tungsten hexafluoride (WF6) that are used in the semiconductor industry
SEMI C69-0611 (first published)
C00358 - SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality StdPbc-0515 SEMI C93-0522 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www. semiviews. org and www. semi. org in April 2018; originally published June 2000; previously published October 2011. The purpose of this Document is to provide specification for octafluorocyclobutane (C4F8), that is used in the semiconductor
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