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and monolithic integrated gas systems
SEMI C41 — Specifications and Guidelines for 2-Propanol
The purpose of this Document is to provide a guide for pentakis dimethylamino tantalum (PDMAT) for which a need has been identified
SEMI MF1049-0308 (Reapproved 1123)
This Document provides recommendations for addressing the problem of damage through closer examination of electric field as a supplement to existing static charge mitigation techniques
G07700 - SEMI G77 - Specification for Frame Cassette for 300 mm Wafers Revision:SEMI G77-0699 (Reapproved 0215) - Superseded and monolithic integrated gas systems1 Purpose 1. 1 This Standard specifies the mechanical features for a 300 mm wafer frame cassette used between the wafer mounting process and the die bonding process. 2 Scope 2. 1 This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. 2. 2 Only the physical interfaces for the frame cassette are specified; no materials
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