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SEMI C16 — Guide for Precision Reporting/Data Traceability
The scope of this Document is all grades of tetraethylorthosilicate used in the semiconductor industry
The experimental data were provided by volunteer participants in this study and have not been independently verified
This Standard describes a Guide for analysis of virgin high-purity ion exchange (HPIX) resin suitable for use in ultrapure water (UPW) polish applications
SEMI F112 — Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)
C02400 - SEMI C24 - Specification for n-Butyl Acetate Revision:SEMI C24-0301 - Superseded SEMI C16 — Guide forNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to standardize requirements for n butyl acetate used in the semiconductor industry and to document testing procedures to support those specifications. Test methods have been shown to
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