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SEMI C44-0301 (technical revision)
SEMI C69-1224 (technical revision)
SEMI C93-0217 (preliminary status removed)
26-0301 (technical revision)
for the intents and purposes of this Guide
C06300 - SEMI C63 - Specification for Organosilicate Precursors Used in Low K CVD Processes Revision:SEMI C63-1108 - Superseded SEMI C44-0301 (technical revision)This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published November 2007; previously published November 2008. The purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and
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